Page 11 - Shimadzu EPMA-8050G

Up to Five High Performance 4-Inch X-Ray Spectrometer Configuration

Spectrometers Can be Mounted

Maintains the 52.5° X-ray take-off angle that is fundamental to analytical performance. Elements analyzed by each crystal and recommended spectrometer configuration
When multiple spectrometer channels are equipped, the optimal spectrometer element for the
X-ray take-off angle
target must be selected from a large number of spectrometer elements.
High: Good spatial resolution Shimadzu’s EPMA is designed to maintain optimal performance without replacing the objective
Electron beam
Low: Poor spatial resolution aperture or otherwise changing the instrument parameters. The same philosophy was applied to
the X-ray spectrometer, so that maximum sensitivity and optimal resolution are assured without the
need to select the Rowland circle radius or replace the slit during analysis.
High sensitivity caused by
Sample
low X-ray absorption
Spectrometer Arrangement
Qualitative analysis Quantitative analysis Mapping/line analysis State analysis
Diagram
X-ray spectrometer providing Supported Supported Supported Supported
good sensitivity and resolution
(Shimadzu EPMA) * Only the Shimadzu EPMA spectrometer, which offers both good sensitivity and resolution, CH5 (EDS)
achieves optimal analysis conditions in all analysis modes.
52.5° Supported to an extent Supported Supported Not supported
X-ray spectrometer
A high X-ray take-off angle Analysis data for foreign matter in a pit. emphasizing good sensitivity Peaks can overlap, More difficult to CH3 CH4
reduces the absorption effect Bottom-left is the distribution of iron (Fe); causing incorrect capture changes in
wavelength.
evaluation.
when the bottom of a deep bottom-right is the distribution of titanium Supported to an extent Not supported Not supported Supported to an extent CH1 CH2
Greater sample
hole or the foreign matter in a (Ti). The high take-off angle used by the X-ray spectrometer More difficult to surface effects; more Difficult to detect
reproduce peak
small peaks.
hole is analyzed for examples. EPMA-8050G ensures highly accurate emphasizing good resolution intensity. difficult to maintain
stable peak intensity
analysis of rough samples. over long periods.
Johanson-type analyzing crystal achieves perfect convergence. Types of Crystals Examples of Analyzing Crystal Combinations
Crystal name 2d value (nm) Detector Comments Spectrometer No. 2Units 3Units 4Units 5Units specification
Johanson-type analyzing Johan-type analyzing LiF 0.401 Kr-EXA * specification specification specification Mainly heavy Mainly light
elements
elements
crystal element crystal element
PET 0.874 Kr-EXA * CH1 Main RAP RAP RAP RAP RAP
Shimadzu applied its unique crystal ADP 1.064 Kr-EXA Sub PbST PbST LSA120 LSA120 LSA120
manufacturing expertise to offer analyzing RAP 2.612 FPC * CH2 Main PbST PbST PbST
R R
crystals that deliver both high sensitivity and high PbST 10.02 FPC * Sub LSA70 LSA70 LSA70
resolution. The Johanson-type analyzing crystal LSA55 Approx. 5.5 FPC For high-sensitivity analysis of O, F CH3 Main LiF LiF LiF LiF LiF
achieves perfect convergence with no aberration. LSA70 Approx. 7 FPC For high-sensitivity analysis of O Sub PET PET PET PET PET
2R 2R LSA80 Approx. 8 FPC For high-sensitivity analysis of N CH4 Main LiF LiF LiF LiF
LSA120 Approx. 12 FPC For high-sensitivity analysis of C Sub ADP ADP ADP ADP
LSA200 Approx. 20 FPC For high-sensitivity analysis of B CH5 Main LiF LSA80
LSA300 Approx. 30 FPC For high-sensitivity analysis of Be Sub PET LSA200
Perfect convergence Imperfect convergence Combinations of analyzing crystal marked * support analysis from 5B to 92U. * No analyzing crystal combination is subject to sample stage drive range
restrictions, option restrictions, or other restrictions.
High sensitivity and high resolution Low sensitivity and low resolution
Spectral Range of Analyzing Crystals
0 10 20 30 40 50 60 70 80 90
EPMA-8050G accommodates up to five 4-inch spectrometers that offer both (1) LiF 20Ca 32Ge 50Sn 80Hg (Atomic number)
high sensitivity and high resolution. (2) PET 14Si 22Ti 36Kr 56Ba 71Lu 92U
13Al 20Ca 33As 52Te 66Dy 80Hg 92U
(3) ADP
8O 13Al 24Cr 36Kr
(4) RAP
Analyzing crystal 5B 7N
The Rowland circle radius in the X-ray spectrometer is an important factor (5) PbST 6C 9F
affecting an EPMA's analytical performance. Increasing the radius of the (6) LSA55 6C 8O
Rowland circle by one inch reduces the detection sensitivity by more than (7) LSA70 5B 7N
(8) LSA80
30%. Shimadzu EPMA instruments accommodate up to five 4-inch 5B 6C
Sample face Detection (9) LSA120
slit spectrometers to cover the entire spectral range. 4Be 5B
(10) LSA200
4Be
(11) LSA300
=K line =L line =M line
EPMA-8050G
Electron Probe Microanalyzer
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