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                       Trace Mapping Analysis                                                                                             Phase Analysis

                     Trace functions can be added to standard mapping analysis.                                                         A scatter diagram is created with the 2D or 3D correlations obtained from mapping data for each element. Regions
                     For samples with surface irregularities or inclination, when                                                       featuring a particular relationship between elements are displayed in different colors.
                     the height changes as a function of the X-Y position, the                                                          In addition, multiple scatter diagrams can be displayed simultaneously, enabling the observation of correlations between
                     sample's Z axis height can be corrected, enabling                                                                  multiple elements.
                     high-accuracy mapping analysis in which reductions in signal                                                                                                      Region containing a great deal of Al and Ca  Region containing
                     intensity are minimized.                                                                                                                                                                         a great dealof Al and Fe
                     This feature is achieved by minutely controlling the stage’s Z
                     axis coordinates during the analysis, based on height data
                     obtained beforehand from multiple points. The trace surface
                     found from the con gured height data can be con rmed via
                     contour lines and 3D displays.



                                                                                                                                                                                       Region containing a great deal of C, and not much Al and Ca
                                                                                                                                        ˔ Features
                                                                                                                                           By creating a 3D image of the scatter diagrams,   Multiple correlations can be analyzed while switching
                                        No trace applied               Trace applied                                                       it is possible to observe the correlation from a   between elements and scatter diagrams.
                                                                                                                                           variety of observation points.
                                                     Illustration of the Basic Principle

                     ˔ Mapping Analysis Results
                        Example of a sample 20 cent coin: Cu mapping
                        A more  correct  elemental distribution  is
                        obtained by using the trace.
                        *The trace is centered on the  gure and periphery. The stars and the border
                        are not targeted.





                                                             Topographical image  No trace applied  Trace applied



                       Trace Line Analysis                                                                                                Electron Penetration Simulator

                     As with trace mapping analysis, trace functions can                                                                It is possible to simulate the analysis depth and width of
                     be added to a standard line analysis.                                                                              the irradiating electron beam penetrated from the surface
                                                                                                                                        of the sample. The X-ray penetration domain can be
                                                                                                                                        calculated by using either the analysis volume model with
                                                                                                                                        which  the electron beam  diffusion  size and  the analysis
                                                                                                                                        domain  are found,  or the  Monte  Carlo  method, which
                                                                                                                                        follows individual electron trajectories to obtain the total
                                                                                                                                        electron trajectory (penetration domain).











                                                                                                                                                                                                                        EPMA-8050G
                                                                                                                                                                                                                         Electron Probe Microanalyzer
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