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 Trace Mapping Analysis  Phase Analysis

 Trace functions can be added to standard mapping analysis.   A scatter diagram is created with the 2D or 3D correlations obtained from mapping data for each element. Regions
 For samples with surface irregularities or inclination, when   featuring a particular relationship between elements are displayed in different colors.
 the height changes as a function of the X-Y position, the   In addition, multiple scatter diagrams can be displayed simultaneously, enabling the observation of correlations between
 sample's Z axis height can be corrected, enabling   multiple elements.
 high-accuracy mapping analysis in which reductions in signal   Region containing a great deal of Al and Ca  Region containing
 intensity are minimized.                                                                   a great dealof Al and Fe
 This feature is achieved by minutely controlling the stage’s Z
 axis coordinates during the analysis, based on height data
 obtained beforehand from multiple points. The trace surface
 found from the con gured height data can be con rmed via
 contour lines and 3D displays.



                                                             Region containing a great deal of C, and not much Al and Ca
               ˔ Features
                  By creating a 3D image of the scatter diagrams,   Multiple correlations can be analyzed while switching
 No trace applied  Trace applied  it is possible to observe the correlation from a   between elements and scatter diagrams.
                  variety of observation points.
 Illustration of the Basic Principle

 ˔ Mapping Analysis Results
 Example of a sample 20 cent coin: Cu mapping
 A more  correct  elemental distribution  is
 obtained by using the trace.
 *The trace is centered on the  gure and periphery. The stars and the border
 are not targeted.





 Topographical image  No trace applied  Trace applied



 Trace Line Analysis  Electron Penetration Simulator

 As with trace mapping analysis, trace functions can   It is possible to simulate the analysis depth and width of
 be added to a standard line analysis.  the irradiating electron beam penetrated from the surface
               of the sample. The X-ray penetration domain can be
               calculated by using either the analysis volume model with
               which  the electron beam  diffusion  size and  the analysis
               domain  are found,  or the  Monte  Carlo  method, which
               follows individual electron trajectories to obtain the total
               electron trajectory (penetration domain).











                                                                                               EPMA-8050G
                                                                                               Electron Probe Microanalyzer
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