Page 22 - Shimadzu EPMA-8050G

Specifications Installation Requirements

Electron Optical System Ambient Conditions Gas
• Temperature 18 °C to 28 °C • PR Gas Mixture of Ar (Argon) + CH4 (Methane) 10vol%.
Electron Source Schottky emitter
(Provide an air conditioning system to control temperature fluctuation within ±1 °C.) Pressure: 1 kPa to 3 kPa
Secondary-Electron Image Resolution 3 nm (30 kV accelerating voltage) • Humidity 30%RH to 60%RH Flow rate: 10 mL/min to 14 mL/min
Analysis Conditions for 20 nm (10 nA beam current) /50 nm (100 nA beam current) / • Heat Generation Rate When used with natural cooling water discharged: Connection port: Connect a gas cylinder filled to the following specifications.
Secondary-Electron Image Resolution 150 nm (1 A beam current) (10 kV accelerating voltage each) Gas filling pressure: 15 MPa max.
Approx. 2.5 kW
Accelerating Voltage 0.1 kV to 30 kV (in 0.1 kV increments. At 5 kV or less, can be set in 10 V units.) When used with cooling water circulation unit: Cylinder port : W22 - 14 right-handed male screw
Approx. 3.3 kW (including heat generated by that unit)
Maximum Beam Current 3 A (30 kV accelerating voltage)
Installation Room • Compressed Air Prepare the following compressed air sources for driving
Beam Current Stability ±0.3 %/h (Beam current: 50 nA, accelerating voltage: 10 kV) the air valves and air dampers. (Two systems)
• Floor Area W4m min.×D3.5m min.×H2.5m min.
Magnification 40× to 400,000× Pressure: 0.45 MPa to 0.6 MPa; connection port: Rc 1/4
• Door Width: 1.25 m min., height: 1.8 m min.
Maximum Pixel Size for Saved Images 5120 × 3840 Power Requirements • Dry Nitrogen Gas (EPMA-1720H only. Recommended for purging electron gun when using CeB6.)
Back-Scattered Electron Detector 4-block, semiconductor detector • Analyzer Single phase 200 V AC ±10%, 30 A, 50/60 Hz, 1 circuit Pressure : 0.08 MPa to 0.1 MPa
Objective Aperture Fixed Type (No selection required) • PC Single phase 100 to 240V AC±10%,5A 50/60Hz,1 circuit Connection port: Joint for tube with 6 mm diameter
Observation Optical System • Ion Pump Backup Power Supply Vibration and Stray Magnetic Fields
Single phase 200 V AC ±10%, 30 A, 50/60 Hz, 1 circuit Indicated in the Pre-Installation Requirements. For more information, contact your Shimadzu representative.
Resolution 1 m (for observation with the naked eye)
Grounding Resistance
Field of View Approx. 600 m dia. (for observation), approx. 480 m × 360 m (on a computer screen) • 100 max. Laws and Regulations
Depth of Field 4 m Cooling Water To prevent X-ray radiation accidents, safety regulations and standards
Sample Stage System • Water Supply Water pressure: 0.08 MPa to 0.18 MPa for devices equipped with X-ray generators have been established in
Water temperature: 20 °C to 25 °C each country. Observe the laws and regulations for X-ray generators that
Maximum Sample Dimension 100 mm × 100 mm × 50 mm t Flow rate: 0.7 L/min are applicable in the country where the product is used. For notifications
Maximum Sample Weight 2kg Faucet outer diameter: 11mm. on installation and safety controls, follow the necessary procedures in
Maximum Stage Drive Range X,Y : 90mm Z : 7mm • Water Drainage Natural drainage (same height as floor) compliance with the laws and regulations applicable in the country
where the product is used.
Minimum Feed Distance X,Y : 0.02 m Z : 0.1 m
Maximum Stage Drive Speed X,Y : 15mm/sec Z : 1mm/sec (1) Rated output: 30 kV, 1 mA max.
(2) Dose rate:1 Sv/h or less.
X-Ray Spectrometer System
Analyte Elements Range 4Beʙ92U Layout Example
Number of X-Ray Spectrometers 2 to 5 channels
400 min.
X-Ray Take-Off Angle 52.5° 4000 min. Unit: mm
Rowland Circle Radius 4 inch (101.6 mm) 1300
Evacuation System
Electrical Air compressor
Vacuum Level Main Chamber 1.0 × 10 Pa or less Distribution panel Cooling water
-3
Electron Gun Chamber 3.5 × 10 Pa or less circulation unit
-7
Evacuation Pump Turbomolecular pumps One unit for main evacuation; one unit for preliminary evacuation
Control Unit
Rotary pumps One unit for main evacuation; one unit for preliminary evacuation Height 750 Power
Ion pumps Two units for the electron gun chamber; one unit for the intermediate chamber 860 220 kg Supply Rack RP
200 kg
Vacuum Detection Penning gauge, Pirani gauge, and ion gauge Flow Switch Box
Automated Functions Automatic evacuation (main chamber evacuation, shut-down, sample loading chamber evacuation),
safety operations via error detection
RP Weight
Computer System
Main Unit 3500 min.
23-inch touch panel LCD (Full HD, 1920 pixels × 1080 pixels), two monitors
Display (One each for observation and analysis operations) Height 1910 1260
Interior of Room 800 kg IP
System for Observation Operation Built-in Type: Windows 10 IoT (64bit) Height 2500 min. Rack
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(Reference Spec) OS: Windows 10 Pro (64bit) , CPU: Intel Core i7-8700 or higher (Recommended), 70 kg
™
PC for Analysis Operation Memory: 8GB or higher, Network: LAN(RJ-45) 1 port required
Analysis Software
Dry
Analysis Mode Qualitative analysis, mapping analysis, quantitative analysis, calibration curve analysis, state analysis, line analysis nitrogen
gas
Automated Analysis Auto sequence analysis, easy mode analysis 900 min.
Operation Support Data browser, report function, instrument monitor PR gas
Management Functions Environment set-up program
Observation Software Entrance
Width 1250 min. 1260 800 min.
Control Functions Electron optical system control, observation system control, sample stage control, X-ray spectrometer control, evacuation system control Height 1800 min.
Automated functions Auto focus, auto stigma, auto contrast/brightness, filament automatic saturation, automatic beam current settings
Note) Parts shown in broken lines are not included in the standard configuration.
EPMA-8050G
Electron Probe Microanalyzer
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