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Observation and Analysis/Evaluation



            Elemental Analysis and Contaminant Analysis


 ● Non-Destructive 3D Measurement of Plastic Connectors and Other Molded Parts  ● Identi cation of Organic Matter and Analysis of Contaminants on Electronic Components



 Dimensional X-Ray CT System  Automatic Failure Analysis System
 XDimensus 300  IRTracer-100 + AIM-9000


 The XDimensus 300 is a dimensional X-ray CT system that can   Using an infrared microscope is one of the most effective ways to identify organic
 measure the 3D internal and external geometry of sample interiors.   contaminant matter originating from raw materials used in manufacturing processes
 In addition to a high-resolution X-ray detector with a large   or from dust in the atmosphere. In this example, a contaminant attached to the
  eld-of-view, a new Shimadzu X-ray generator, and new software   terminal of an electronic component was analyzed. Using a camera with a large
 with outstanding operability, the system features an air conditioning    eld-of-view allows all steps from observing the overall component to deciding
 system that maintains a constant temperature inside the instrument,   measurement locations to be accomplished smoothly. The ATR method (with a Ge
 a frame that ensures high geometric stability, and a stage with   prism) can provide an effective way to measure thin stains, small contaminants, and
 ultra-accurate sample positioning. Those features achieve a   other substances from which good re ectance spectra are dif cult to obtain.
 dimensional X-ray CT system with the highest measurement accuracy
 available in Japan. The XDimensus 300 system can be expected to
 help improve operating ef ciency and quality control systems for   0.125
 various product inspections or drawing veri cations.          0.100

                                                               0.075
                                                              Abs
                                                               0.050
                                                               0.025
 Unlike optical coordinate measuring devices, the
 XDimensus 300 is unaffected by the color of sample             0
               Observation Image of the  Observation Image of Contaminant  4000  3600  3200  2800  2400  2000  1800  1600  1400  1200  1000  800cm -1
 surfaces. Dimensions can be measured even if sample
               Entire Electronic Component  on Terminal Magnified by 15x with  Reflection Mode Spectrum of Contaminant Identified as Silicate
 surfaces are transparent or re ective like a mirror.  via Wide-View Camera  Cassegrain Mirror
 In addition to measuring dimensions, it can compare
 shape measurements from two sets of CT data.
 Deviations in three-dimensional shapes can be
 represented as color-coded maps to compare the   Example of Electronic Circuit Board Failure Analysis  ̶ Imaging with an AIM-9000 Infrared Microscope ̶
 shapes of molded plastic parts and evaluate mold
 deterioration over time.  The microscope re ection method was used for imaging analysis of a relatively large range.
               An area 200 µm tall by 325 µm wide was measured.

                                                               0.7                   Paraf n oil
                                                               Abs                   Paraf n oil + silicate
                                                               0.6
                                                               0.5
                                                               0.4
                                                               0.3
                                                               0.2
 Surface Data (Simultaneous Scan of Identical Products)
                                                               0.1
                                                               0.0
                                                                4000  3600  3200  2800  2400  2000  1800  1600  1400  1200  1000  800cm -1
                           Tiled Image of Electronic Circuit Board  Infrared Spectrum Obtained from Area on the Circuit Board Indicated with Red Box

                       Calculation Formula    Calculation Formula








 Comparison of Shape Measurements in Two Sets of CT Data            Left: Distribution of Paraf n Oil (Height of Peak at 1377 cm-1)
                       Peak height (1330.88 - 1377.17 - 1415.75, with baseline correction)  Peak height (867.97 - 972.12 - 1211.30, with baseline correction)  Right: Distribution of Silicate (Height of Peak at 972 cm-1)






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