Page 22 - Shimadzu EPMA-1720 Series
P. 22

Continual, Detailed Enhancements Ensure

            Excellent Reliability


            High-speed, submicron-step sample stage

            The new sample stage offers high-speed 15 mm/s max. drive speed in 0.1 µm steps . The precise movements
                                                                                        *
            and rapid speed, while maintaining highly accurate repeatability, considerably enhance work efciency.
            * 0.02 m minimum steps during analysis

                                                                  Comparison of Centering Results





                                      Edge-to-edge
                                     travel in approx.
                                         7 sec




                                                             0.1 µm steps               1 µm steps
                                                             This example shows differences in accuracy for
                                                                centering at the center of the par ticle.

            Low-acceleration SEM observations

            The beam axis can be optimized for each acceleration voltage, making it simple to take
            low-acceleration SEM observation. The acceleration voltage can be adjusted in 10 V increments to
            restrict charge build-up on non-conductive samples.
                                Observations of Non-Conductive Samples without Conductive Coating



















                            Acceleration voltage 15 kV                Acceleration voltage 920 V

            User-management functions
            Multiple login user names can be classied into different authority categories for user management.
            This protects the security of the system and analysis data when the instrument is shared with other
            departments or with multiple guest users.
                                        Browsing,                   Browsing,
                                        deleting,                   deleting,
                                        privacy setting             privacy setting
                         Administrator             Deleting  Privacy setting   Deleting  Privacy setting

                                        Deleting,                   Deleting,
                                        privacy setting             privacy setting



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