Page 24 - Shimadzu EPMA-1720 Series

Spectrometer Con guration

Elements analyzable by each analyzing crystal and recommended spectrometer con guration

When multiple spectrometer channels are equipped, the optimal spectrometer element for the target
must be selected from a large number of spectrometer elements.
Shimadzu’s EPMA is designed to maintain optimal performance without replacing the objective
aperture or otherwise changing the instrument parameters. The same philosophy was applied to the
X-ray spectrometer, so that maximum sensitivity and optimal resolution are assured without the need
to select the Rowland circle radius or replace the slit during analysis.

Spectrometer Arrangement Diagram
Qualitative analysis Quantitative analysis Mapping/line analysis State analysis
X-ray spectrometer providing Supported Supported Supported Supported
good sensitivity and resolution * Only the Shimadzu EPMA spectrometer, which offers both good sensitivity and resolution, (EDS)
(Shimadzu EPMA) achieves optimal analysis conditions in all analysis modes.
CH 5
Supported to an extent Supported Supported Not supported
X-ray spectrometer Peaks can overlap, causing More difficult to capture
emphasizing good sensitivity incorrect evaluation. changes in wavelength.
CH 3 CH 4
Supported to an extent Not supported Not supported Supported to an extent
More difficult to Greater sample surface Difficult to detect small
X-ray spectrometer reproduce peak intensity. effects; more difficult to peaks.
emphasizing good resolution maintain stable peak CH 1 CH 2
intensity over long
periods.

Types of Crystals Examples of Analyzing Crystal Combinations
Crystal name 2d value (nm) Detector Comments 2 Unit 3 Unit 4 Unit 5 Unit speci cation
Spectrometer No. Mainly heavy Mainly light
LiF 0.401 Kr-EXA * speci cation speci cation speci cation elements elements
PET 0.874 Kr-EXA * CH 1 Main RAP RAP RAP RAP RAP
ADP 1.064 Kr-EXA Sub PbST PbST LSA120 LSA120 LSA120
RAP 2.612 FPC * CH 2 Main PbST PbST PbST
PbST 10.02 FPC * Sub LSA70 LSA70 LSA70
LSA55 Approx. 5.5 FPC For high-sensitivity analysis of O, F CH 3 Main LiF LiF LiF LiF LiF
LSA70 Approx. 7 FPC For high-sensitivity analysis of O Sub PET PET PET PET PET
LSA80 Approx. 8 FPC For high-sensitivity analysis of N CH 4 Main LiF LiF LiF LiF
LSA120 Approx. 12 FPC For high-sensitivity analysis of C Sub ADP ADP ADP ADP
LSA200 Approx. 20 FPC For high-sensitivity analysis of B CH 5 Main LiF LSA120
LSA300 Approx. 30 FPC For high-sensitivity analysis of Be Sub PET LSA200
Combinations of analyzing crystal marked * support analysis from 5 B to 92 U. • No analyzing crystal combination is subject to sample stage drive range restrictions, option
restrictions, or other restrictions.

Spectral Range of Analyzing Crystals
0 10 20 30 40 50 60 70 80 90
(Atomic number)
20Ca 32Ge 50Sn 80Hg
(1) LiF
14Si 22Ti 36Kr 56Ba 71Lu 92U
(2) PET
13Al 20Ca 33As 52Te 66Dy 80Hg 92U
(3) ADP
8O 13Al 24Cr 36Kr
(4) RAP
5B 7N
(5) PbST
6C 9F
(6) LSA55
6C 8O
(7) LSA70
5B 7N
(8) LSA80
5B 6C
(9) LSA120
4Be 5B
(10) LSA200
4Be
(11) LSA300
= K line = L line = M line
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