Page 8 - Shimadzu SolidSpec-3700i

Large Sample Compartment Accommodates a

Wide Variety of Samples.

The SolidSpec-3700i/3700i DUV have large sample the sample compartment and an entire sample area of A wide variety of accessories, such as absolute performed with the optional Automatic X–Y Stage
compartments which allow large samples to be 12 inches or 310 × 310 mm is measurable by mounting specular reflectance attachments and relative by inputting the intervals and the rotation angles
measured without sample destruction. Their internal the Automatic X–Y stage (optional). The vertical optical specular reflectance attachments, expand the for the sample.
dimensions are 900W × 700D × 350H mm. A sample with path makes it possible to perform transmission or application range. Automatic measurements can be
a maximum size of 700W × 560D × 40H mm can be set in reflectance measurements of large samples.
Automatic Measurement
Large Sample Compartment
Automatic X–Y Stage (Optional)
The Automatic X–Y Stage developed for the SolidSpec-3700i/3700i DUV enables automatic measurements for the
points specified in advance while maintaining the nitrogen gas purge.

12 inch Silicon Wafer on Automatic X–Y Stage Input of Intervals and Rotation Angles

Direct Measurement of Liquid Samples and Solid Samples without Integrating Sphere

Direct Detection Unit (Optional)
The SolidSpec-3700i/3700i DUV can measure samples mounting the Direct Detection Unit (DDU-DUV) in the
Large Sample Compartment with an integrating sphere as the standard detection SolidSpec-3700i DUV, measurements down to 165 nm (note)
A sample of 700W × 560D mm is set in the sample compartment. system. However, some samples require measurement are possible. Measurements with the Direct Detection
without using an integrating sphere. The Direct Unit can be performed simply by switching a mirror.
Detection Unit was created for just such instances. By
Three Dimensional Optical Path

The three-dimensional optical path enables
non-destructive measurement of large samples, without
having to cut them smaller. In the optical path of previous
models, light only traveled horizontally, but the new
models include a three-dimensional optical path (U.S.
patent 6583872) with light also traveling in the vertical
direction. Samples can be placed horizontally, which
makes it easier to place large samples.

Measurement of Film Sample with Direct Detection Unit Measurement of Liquid Sample with Direct Detection Unit

Note) In order to measure below 190 nm with SolidSpec-3700i DUV, nitrogen gas purging is required to remove interfering oxygen molecules inside of
Three Dimensional Optical Path the SolidSpec-3700i DUV. The measurable range for the SolidSpec-3700i with the optional Direct Detection Unit is 190 nm to 3300 nm.

SolidSpec-3700i/3700i DUV
8 UV-VIS-NIR Spectrophotometer 9