Page 6 - Shimadzu SolidSpec-3700i

Wide Measurement Wavelength Range (SolidSpec-3700i DUV)

The development of precise laser machining using an ultraviolet laser such as an ArF excimer laser enhances Integrating Sphere for Deep Ultraviolet Measurement
the requirement for transmittance or reflectance measurements of optical parts in the deep ultraviolet region.
The SolidSpec-3700i DUV (note 1) enables measurement in the range of 175 nm to 2600 nm (note 2) with an integrating
sphere and the range of 165 nm to 3300 nm (note 3) by mounting the optional Direct Detection Unit DUV. With this 150.000
additional unit, the range from deep ultraviolet to near-infrared is now measurable. Spectra with low noise can be obtained even for wavelengths
140.000
near 190 nm, which are difficult to measure accurately using a
regular spectrophotometer.
The ability to measure spectra in this wavelength range is
Nitrogen Gas Purge 120.000 especially helpful when measuring semiconductor materials used
for ArF excimer lasers.
Oxygen molecules in the atmosphere absorb T%
ultraviolet light under 190 nm. Nitrogen gas 100.000
purging for both the optical and the sample
compartment is required to remove the
interfering oxygen molecules. Since the 80.000
SolidSpec-3700i DUV has purge inlets for
each compartment, efficient nitrogen gas
purge is possible so that the time required for 60.000 The 100% baseline spectra measured on the SolidSpec-3700i DUV with an
purging after sample replacement is reduced, integrating sphere for deep ultraviolet measurement and the SolidSpec-3700i
with a normal integrating sphere are shown in the left figure.
and high sensitivity with lower stray light in 50.000 200.00 250.00 300.00
175.00
the deep UV region is achieved. nm
: SolidSpec-3700i DUV with an integrating sphere for the deep
ultraviolet measurement
: SolidSpec-3700i with a normal integrating sphere

Example of Deep Ultraviolet Region measurement

70.000
Integrating Sphere and Photomultiplier for the Deep Ultraviolet Region In order to perform high-accuracy measurements in the deep UV
region, a sufficient quantity of light and significant low stray
60.000 light are required. The transmission spectrum of a silica plate
Materials which do not absorb deep measured with the Direct Detection Unit DDU-DUV (optional) is
ultraviolet light are required to be used as shown in the left figure. Spectra with significantly lower noise
the window material for the detector and are obtainable in the ultraviolet region.
the material for the inside of the
40.000
integrating sphere to enable performance T%
in the deep ultraviolet region. The
SolidSpec-3700i DUV or D 2 lamp uses a
PMT detector with fused silica as the
window material and an integrating 20.000
sphere with resin that has highly reflective
characteristics in the deep ultraviolet
Integrating Sphere for Deep Ultraviolet Photomultiplier for Deep Ultraviolet region as the inside material.
0.000
165.00 170.00 180.00 190.00 200.00 Transmission Spectra of Silica Plate
nm
Note 1) In order to measure the range below 190 nm with the SolidSpec-3700i DUV, nitrogen gas purge is required to remove interference from oxygen molecules inside the SolidSpec-3700i DUV. : Transmission spectrum of Silica plate measured with nitrogen purge
Note 2) The measurable range for SolidSpec-3700i is 240 nm to 2600 nm.
Note 3) The measurable range for SolidSpec-3700i with the optional Direct Detection Unit is 190 nm to 3300 nm. : Transmission spectrum of Silica plate measured without nitrogen purge

SolidSpec-3700i/3700i DUV
6 UV-VIS-NIR Spectrophotometer 7