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Small Spot Analysis Kit (Option)  Specifications








 For Analysis of Small Contaminants and Defect Analysis in Small Regions  Measurement principle  X-ray fluorescence spectrometry  Installation Example
             Measurement method  Energy dispersion
 This option can be used to analyze even smaller areas by replacing the collimator plate and sample   429  249  Units: mm
             Target samples   Solids, liquids, powders
 observation camera. It is especially useful for analyzing trace foreign matter and defects in micro areas,   Measuring range  6C to 92U
 and measuring plating thickness.  Sample size  Max. W 300 × D 275 × approx.H 100 mm (excluding radiuses)  158  Rotary pump  160  Control
                                                                                                       Switch box
             Maximum sample mass  5 kg (200g per sample when using turret, Gross mass 2.4 kg)
 Minimum 0.3 mm X-Ray Irradiation Diameter  Dose rate  1  Sv/h or less.
 The excitation X-rays can be collimated to 0.3 mm in diameter, which is effective for the   200 min.
 high-accuracy analysis of small contaminants and for defect analysis in small regions,   X-ray generator
 Sample Image at an Irradiation Diameter  X-ray tube  Rh target (Standard model/Premium model)* 1
 analyses difficult with standard specifications (minimum 1 mm in diameter).  of 0.3 mm (Extended Zoom)
 Sample: stainless powder (approx. 0.1 mm)  Voltage  4 kV to 50 kV
 Enlarged Sample Images without Image Quality Degradation  collected on filter paper  Current  1  A to 1000  A
             Cooling method   Air-cooled (with fan)                      750  590
 This system supports smaller samples, which heightens the visibility of sample
             Irradiated area  Automatic switching in four stages: 1, 3, 5, and
 observation images. Users can switch to an enlarged image approximately 2.5 times   10 mm diameter
 Irradiation area             Automatic switching in four stages: 0.3, 1, 3,
 larger than a previous image, without image quality degradation.  0.3 mm in diameter  and 10 mm diameter* 2
 (yellow circle)
             Primary filters   Five types (six, including the open position),
 Automatic Four-Stage Switching Between 0.3, 1, 3, and 10 mm in Diameter  Irradiation area  automatic replacement
 1 mm in diameter
 The irradiation diameter automatically switches between 0.3, 1, 3, and 10 mm in diameter.   (green circle)
             Detector
 This system supports not only the analysis of small spots but also macro composition
             Type             Silicon drift detector (SDD)                    360
 analysis at 10 mm in diameter.  Liquid nitrogen  Not required (electronic cooling)
 Note: The irradiation diameter is the size on the sample surface.  Metal Plated Terminals
 (At 1 mm in diameter, the irradiation area is not
 Irradiation diameter  Extended zoom button  within the measurement area, so measurements   460
 switching buttons  (Enlargement to approx.  Sample chamber
  2.5 times the camera image)  are impossible. At 0.3 mm in diameter,                   1200
                                      1
 measurements are possible.)  Measurement atmosphere   Air, vacuum* , helium (He)* 1
             Sample replacement   12-sample turret* 1
 PCEDX Navi Sample Image Setting Fields  Sample observations   Semiconductor camera  Vacuum measurement unit (optional) consists of a control
                                                                       switch box and rotary pump.
 Analysis Example—Small Metal Powder (Approx. 0.1 mm in Diameter) Adhered to the Surface of Snacks  Data processor
             CPU              Intel Core i5 or above
 A small metal powder approximately 0.1 mm in diameter adhered to the commercially available snacks was analyzed with irradiation diameters
             Memory           4 GB min.
 of 1 mm and 0.3 mm, respectively. At an irradiation diameter of 1 mm, the overall background is significantly increased due to the influence of
             HDD              250 GB min.
 scattered X-rays from the surrounding area of the metal powder (snacks), resulting in a poor S/N ratio. At an irradiation diameter of 0.3 mm,   Optical drive  Super multi drive
 however, the influence of scattered X-rays from the surrounding area is small, and peak profiles with a good S/N ratio are obtained.  OS  Windows  10 Pro (64-bit)* 2
                                    ®
 Copper (Cu) and Zinc (Zn) are detected as the major components with both irradiation diameters. It indicates that the metal powder is brass
 regardless of the irradiation diameter used. However, at 0.3 mm in diameter, the peak of Lead (Pb) is also identified, which suggests that the   Software
             Qualitative analysis  Measurement/analysis software
 metal powder is “free cutting brass”.
             Quantitative analysis  Calibration curve method, correction for coexistent elements,
 By using an irradiation diameter of 0.3 mm, more accurate analyses can be performed, even for small contaminants on substances such as   FP method, film FP method, background FP method
 organic materials that strongly scatter X-rays.  Matching software  Intensity/content
             Utilities        Automatic calibration functions
 CuKa  ø1 mm                  (energy calibration, FWHM calibration)
 ø0.3 mm  RhKaC  Others       Instrument status monitoring function,
                              analysis results tabulation function
 CaKa
 ZnKa
 ZnKb        Installation
             Installation
                              10 °C to 30 °C (temperature fluctuation rate 2 °C/hour
             Temperature
             Temperature      10 °C to 30 °C (temperature fluctuation rate 2 °C/hour
 Sample Image                 max., temperature fluctuation range: 10 °C max.)
                              max., temperature fluctuation range: 10 °C max.)
 (The yellow circle at the center is 0.3 mm.)
 PbLa  PbLb1  Relative humidity  40 % to 70 % (no condensation)
                              40 % to 70 % (no condensation)
             Relative humidity
                              100-240 V AC ±10 %, 2 A earthed socket
             Power supply
 CuKb  RhKa  Power supply     100-240 V AC ±10 %, 2 A earthed socket       This product conforms to Shimadzu's
                                                                               Eco-labeled designation.
                              W 460 × D 590 × H 360 mm
                              W 460 × D 590 × H 360 mm
             Dimensions
             Dimensions
 CaKb  FeKa  ZnKb  SrKa  RhKbC  Weight  Approx. 45 kgɹ                    * Energy savings: 44.1% reduction as
             Weight
                              Approx. 45 kgɹ
 KKa  PbLa  PbLb1  RhKb  * 1  Option for EDX-8100                             compared to the previous model
            * 2  Microsoft ®  Office is not included.
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