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Small Spot Analysis Kit (Option)                                                                                          Specifications








            For Analysis of Small Contaminants and Defect Analysis in Small Regions                                                    Measurement principle  X-ray fluorescence spectrometry  Installation Example
                                                                                                                                       Measurement method  Energy dispersion
            This option can be used to analyze even smaller areas by replacing the collimator plate and sample                                                                                       429                     249   Units: mm
                                                                                                                                       Target samples   Solids, liquids, powders
            observation camera. It is especially useful for analyzing trace foreign matter and defects in micro areas,                 Measuring range  6C to 92U
            and measuring plating thickness.                                                                                           Sample size      Max. W 300 × D 275 × approx.H 100 mm (excluding radiuses)  158  Rotary pump  160  Control
                                                                                                                                                                                                                                 Switch box
                                                                                                                                       Maximum sample mass  5 kg (200g per sample when using turret, Gross mass 2.4 kg)
            Minimum 0.3 mm X-Ray Irradiation Diameter                                                                                  Dose rate        1  Sv/h or less.
            The excitation X-rays can be collimated to 0.3 mm in diameter, which is effective for the                                                                                                         200 min.
            high-accuracy analysis of small contaminants and for defect analysis in small regions,                                     X-ray generator
                                                                                        Sample Image at an Irradiation Diameter        X-ray tube       Rh target (Standard model/Premium model)* 1
            analyses difficult with standard specifications (minimum 1 mm in diameter).    of 0.3 mm (Extended Zoom)
                                                                                       Sample: stainless powder (approx. 0.1 mm)       Voltage          4 kV to 50 kV
            Enlarged Sample Images without Image Quality Degradation                        collected on filter paper                  Current          1  A to 1000  A
                                                                                                                                       Cooling method   Air-cooled (with fan)                     750   590
            This system supports smaller samples, which heightens the visibility of sample
                                                                                                                                       Irradiated area  Automatic switching in four stages: 1, 3, 5, and
            observation images. Users can switch to an enlarged image approximately 2.5 times                                                           10 mm diameter
                                                                           Irradiation area                                                             Automatic switching in four stages: 0.3, 1, 3,
            larger than a previous image, without image quality degradation.  0.3 mm in diameter                                                        and 10 mm diameter* 2
                                                                           (yellow circle)
                                                                                                                                       Primary filters   Five types (six, including the open position),
            Automatic Four-Stage Switching Between 0.3, 1, 3, and 10 mm in Diameter  Irradiation area                                                   automatic replacement
                                                                           1 mm in diameter
            The irradiation diameter automatically switches between 0.3, 1, 3, and 10 mm in diameter.   (green circle)
                                                                                                                                       Detector
            This system supports not only the analysis of small spots but also macro composition
                                                                                                                                       Type             Silicon drift detector (SDD)                   360
            analysis at 10 mm in diameter.                                                                                             Liquid nitrogen  Not required (electronic cooling)
            Note: The irradiation diameter is the size on the sample surface.               Metal Plated Terminals
                                                                                      (At 1 mm in diameter, the irradiation area is not
            Irradiation diameter              Extended zoom button                    within the measurement area, so measurements                                                                           460
            switching buttons                 (Enlargement to approx.                                                                  Sample chamber
                                               2.5 times the camera image)              are impossible. At 0.3 mm in diameter,                                                                                    1200
                                                                                                                                                                1
                                                                                           measurements are possible.)                 Measurement atmosphere   Air, vacuum* , helium (He)* 1
                                                                                                                                       Sample replacement   12-sample turret* 1
                     PCEDX Navi Sample Image Setting Fields                                                                            Sample observations   Semiconductor camera                Vacuum measurement unit (optional) consists of a control
                                                                                                                                                                                                 switch box and rotary pump.
            Analysis Example—Small Metal Powder (Approx. 0.1 mm in Diameter) Adhered to the Surface of Snacks                          Data processor
                                                                                                                                       CPU              Intel Core i5 or above
            A small metal powder approximately 0.1 mm in diameter adhered to the commercially available snacks was analyzed with irradiation diameters
                                                                                                                                       Memory           4 GB min.
            of 1 mm and 0.3 mm, respectively. At an irradiation diameter of 1 mm, the overall background is significantly increased due to the influence of
                                                                                                                                       HDD              250 GB min.
            scattered X-rays from the surrounding area of the metal powder (snacks), resulting in a poor S/N ratio. At an irradiation diameter of 0.3 mm,   Optical drive  Super multi drive
            however, the influence of scattered X-rays from the surrounding area is small, and peak profiles with a good S/N ratio are obtained.  OS    Windows  10 Pro (64-bit)* 2
                                                                                                                                                              ®
            Copper (Cu) and Zinc (Zn) are detected as the major components with both irradiation diameters. It indicates that the metal powder is brass
            regardless of the irradiation diameter used. However, at 0.3 mm in diameter, the peak of Lead (Pb) is also identified, which suggests that the   Software
                                                                                                                                       Qualitative analysis  Measurement/analysis software
            metal powder is “free cutting brass”.
                                                                                                                                       Quantitative analysis  Calibration curve method, correction for coexistent elements,
            By using an irradiation diameter of 0.3 mm, more accurate analyses can be performed, even for small contaminants on substances such as      FP method, film FP method, background FP method
            organic materials that strongly scatter X-rays.                                                                            Matching software  Intensity/content
                                                                                                                                       Utilities        Automatic calibration functions
                                                  CuKa     ø1 mm                                                                                        (energy calibration, FWHM calibration)
                                                           ø0.3 mm         RhKaC                                                       Others           Instrument status monitoring function,
                                                                                                                                                        analysis results tabulation function
                                       CaKa
                                                   ZnKa
                                                           ZnKb                                                                        Installation
                                                                                                                                       Installation
                                                                                                                                                        10 °C to 30 °C (temperature fluctuation rate 2 °C/hour
                                                                                                                                       Temperature
                                                                                                                                       Temperature      10 °C to 30 °C (temperature fluctuation rate 2 °C/hour
                                                                                Sample Image                                                            max., temperature fluctuation range: 10 °C max.)
                                                                                                                                                        max., temperature fluctuation range: 10 °C max.)
                                                                            (The yellow circle at the center is 0.3 mm.)
                                                            PbLa  PbLb1                                                                Relative humidity  40 % to 70 % (no condensation)
                                                                                                                                                        40 % to 70 % (no condensation)
                                                                                                                                       Relative humidity
                                                                                                                                                        100-240 V AC ±10 %, 2 A earthed socket
                                                                                                                                       Power supply
                                                    CuKb                      RhKa                                                     Power supply     100-240 V AC ±10 %, 2 A earthed socket      This product conforms to Shimadzu's
                                                                                                                                                                                                         Eco-labeled designation.
                                                                                                                                                        W 460 × D 590 × H 360 mm
                                                                                                                                                        W 460 × D 590 × H 360 mm
                                                                                                                                       Dimensions
                                                                                                                                       Dimensions
                                        CaKb  FeKa   ZnKb       SrKa             RhKbC                                                 Weight           Approx. 45 kgɹ                              * Energy savings: 44.1% reduction as
                                                                                                                                       Weight
                                                                                                                                                        Approx. 45 kgɹ
                                      KKa               PbLa  PbLb1                 RhKb                                              * 1  Option for EDX-8100                                          compared to the previous model
                                                                                                                                      * 2  Microsoft ®  Office is not included.
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