Page 13 - Material Characterizations

Electron

Probe

Micro

Analyser

EPMA

A powerful tool capable of high resolution imaging
and high resolution analysis of chemical composition,
chemical state and even crystalline structure. A far

more superior instrument than scanning electron
microscope with EDX (SEM + EDX).

How It Works
EPMA has an electron gun and a sophisticated optics system. By
varying energy of electron beams, interactions between incident electron
beam and sample produce signals. These signals are captured with
appropriate detectors to yield backscatter images and secondary
electron images. With the presence of an optical microscope, optical
images complement the information provided by electron images.

Wavelength dispersive X-ray fluorescence (WDX) spectrometry is typically
an integral part of EPMA. Instead of X-ray photons as the excitation
energy as in the case of a standalone WDX system, EPMA uses electron
beams to generate the effects. Additional analytical techniques such EPMA-8050G
as energy dispersive X-ray (EDX) fluorescence spectrometry and cathode-
luminescence attachment can be added.

Major Advantages Areas of Application

The superb WDX resolution is the • Metal Industry
source of EPMA advantages. It • Machinery Manufacturing Industry
enables wide range of elemental • Ship-building Industry
analysis and mapping, as well as • Chemical Industry
chemical state analysis. The latter is • Aerospace Industry
not possible in a SEM with EDX. • Materials R&D Industry
• Resources & Energy Industry
• Semiconductor & Electronic Industry EPMA-1720 Series

Excellence in Science 17
Excellence in Science 17