Page 15 - Material Characterizations
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Electron Probe Micro Analyser EPMA
EPMA-1720Series
Key Features and Capabilities
• 5nm - Secondary Electron Image Resolution • Backscatter Electron Imaging
• High resolution mapping • Optical Microscope Imaging
• Chemical State Analysis • Mapping
• Wavelength Dispersive X-Ray (WDX) Spectrometer • Magnification 400,000x
• Secondary Electron Imaging • Cathode-Luminescence attachment*
Maintains the 52.5° X-ray take-off angle that is fundamental to analytical performance. SEM Observation Mapping Analysis
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Analysis data for foreign matter in a pit. ① is the distribution of iron (Fe); ② is the distribution of titanium (Ti). Image of Tin Balls Analysis of solder
The high take-off angle used by the EPMA-1720 ensures highly accurate analysis of rough samples. Magnification: 10,000x Element: Pb; region 14 × 14 µm
Elemental Range • Standard 5B to 92U • Optional 4Be to 92U
Excellence in Science 19
