Page 5 - Shimadzu EPMA-8050G
P. 5

Ultra-High-Resolution Mapping
               A mapping analysis of Sn balls on carbon was performed at a magnification of 30,000×. Even Sn particles a mere 50 nm in diameter,
               visible in the SE image (left), can be confirmed precisely in the X-ray image (right).



















               SE                                 500nm        Sn                                  500nm

               The Benefits of Cutting-Edge Technology


               Unprecedented Spatial Resolution                Highest Secondary-Electron Image
               The secondary-electron image resolution of 3 nm (30 kV accelerating voltage) is the   Resolution of 3 nm
               highest level for an EPMA system.               This is a sample observation of gold particle deposition on
               This is the ultimate secondary-electron image resolution under analysis conditions.  carbon. A maximum resolution of 3 nm (at 30 kV) is
               (With an accelerating voltage of 10 kV, 20 nm at 10 nA / 50 nm at 100 nA / 150 nm at 1  A)
                                                               achieved. The beam is focused even at a comparatively large
               Large Beam Current Enabling                     beam current, so a smooth, high-resolution SEM image is
               Ultra-High-Sensitivity Analysis                 easily obtained.
               This system achieves a maximum beam current of 3.0  A (30 kV accelerating voltage).
               There is no need to replace the objective aperture across the entire beam current range.
               Up to Five High-Performance 4-Inch X-Ray
               Spectrometers Can be Mounted
               The 52.5° X-ray take-off angle is in a class by itself.
               The 4-inch Rowland circle radius provides both high sensitivity and high resolution.
               The system can accommodate up to five X-ray spectrometers of the same type.
               Simple and Easy-to-Understand Operations
               for All Analyses
               Advanced operability ensures that all operations can be performed with just a mouse.
               The user interface is designed for ease of use.
               Easy mode analysis automates all processes up to generating reports.


               Ultra-High-Sensitivity Mapping
               A mapping analysis of stainless steel was performed with a beam current of 1  A at a magnification of 5,000x (Left). The distribution of phases
               with slightly different Cr concentrations is precisely captured (Right). The system succeeds in visualizing a distribution of Mn content under 0.1 %.



















               Cr                                              Mn
                                                 5 m                                              5 m
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