Page 4 - Shimadzu EPMA-8050G

Ultra-High-Resolution Mapping
A mapping analysis of Sn balls on carbon was performed at a magnification of 30,000×. Even Sn particles a mere 50 nm in diameter,
visible in the SE image (left), can be confirmed precisely in the X-ray image (right).

SE 500nm Sn 500nm

The Benefits of Cutting-Edge Technology

Unprecedented Spatial Resolution Highest Secondary-Electron Image
The secondary-electron image resolution of 3 nm (30 kV accelerating voltage) is the Resolution of 3 nm
highest level for an EPMA system. This is a sample observation of gold particle deposition on
This is the ultimate secondary-electron image resolution under analysis conditions. carbon. A maximum resolution of 3 nm (at 30 kV) is
(With an accelerating voltage of 10 kV, 20 nm at 10 nA / 50 nm at 100 nA / 150 nm at 1 A)
achieved. The beam is focused even at a comparatively large
Large Beam Current Enabling beam current, so a smooth, high-resolution SEM image is
Ultra-High-Sensitivity Analysis easily obtained.
This system achieves a maximum beam current of 3.0 A (30 kV accelerating voltage).
There is no need to replace the objective aperture across the entire beam current range.
Up to Five High-Performance 4-Inch X-Ray
Spectrometers Can be Mounted
The 52.5° X-ray take-off angle is in a class by itself.
The 4-inch Rowland circle radius provides both high sensitivity and high resolution.
The system can accommodate up to five X-ray spectrometers of the same type.
Simple and Easy-to-Understand Operations
for All Analyses
Advanced operability ensures that all operations can be performed with just a mouse.
The user interface is designed for ease of use.
Easy mode analysis automates all processes up to generating reports.

Ultra-High-Sensitivity Mapping
A mapping analysis of stainless steel was performed with a beam current of 1 A at a magnification of 5,000x (Left). The distribution of phases
with slightly different Cr concentrations is precisely captured (Right). The system succeeds in visualizing a distribution of Mn content under 0.1 %.

Cr Mn
5 m 5 m