Page 5 - Shimadzu Axis Supra+

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FAST PARALLEL IMAGING 200 200 200 200
The lateral distribution of elements or chemistry at the 150 150 150 150
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surface is measured by XPS imaging. The AXIS Supra 100 100 100 100
acquires fast, high spatial resolution parallel images. 50 50 50 50
Parallel image acquisition has the advantage that it is m m m 0 m 0
significantly faster and achieves higher spatial resolution 0.00 0.00 0.00 0.00
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than the more conventional rastered beam approach.
Parallel imaging may also be combined with stage -100 -100 [Si] [Si] -100 -100 [O][O]
movements to acquire a ‘stitched’ image, capable of -150 -150 -150 -150
generating images over several millimetres with spatial -200 -200 -200 -200
resolution of several microns. -200 -150 -100 -50-150 -100 -50 50 0 100 150 200150 200 -200 -150 -100 -50-100 -50 500 100 150 200150 200
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Capabilities provided by parallel imaging include: 200 200 1.00 1.00 200 200 1.00 1.00
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• Ultimate spatial resolution of 1 μm at the highest
magnification. 100 100 100 100
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• High energy resolution, chemical state imaging.
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• Quantitative imaging – the unique spherical mirror 0.00 0.00 0.00 0.00
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analyser and delay-line detector can provide
quantitative chemical state images. -100 -100 [AI] [AI] -100 -100 [Pb] [Pb]
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• Spectromicroscopy – easy acquisition of spectra from
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image datasets providing a spectrum at each pixel.
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Quantitative images where colour scale represents relative amount of each
element present at the surface.
VERSATILE ESCApe SOFTWARE FOR
ACQUISITION AND PROCESSING
ESCApe has been developed to make User interaction
with the spectrometer as simple as possible, integrating
acquisition and processing to fully exploit automation
of the hardware. An example of this is the group array
analysis capability within ESCApe. This functionality allows
the User to drag an area across a sample and define an
array of analysis points, from which spectra are acquired.
Automated peak identification and quantification allows
easy generation of a colour concentration map of
identified elements over the sample surface.

[Cu 2p] [Na 1s] [C1 2p] [C 1s] [O 1s]

Group array analysis of an inhomogeneous distribution of Cu-nanoparticles on a graphite substrate. Colour scale used to represent relative
elemental concentration.

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