Page 13 - Shimadzu Xslicer SMX-6010

System Configuration Principles and Features of Planer CT Imaging

An easy-to-maintain Capable of Maximum Image Enlargement for Planer Samples

Shimadzu X-ray generator and various safety mechanisms
reduce costs and ensure safe use. Planer CT
Scanning large circuit boards
X-ray detector with planer CT:
The sample is mounted on an XY stage, so it
can approach the X-ray generator, enabling
X-Ray Generator XY stage maximum image enlargement.

The Xslicer SMX-6010 features a160-kV open tube and can resolve down to 1 micron.
Due to the integrated high-voltage transformer, no greasing is necessary.
The filament replacement process is simplified by automatic adjustments.
Note: 1 m resolution by JIMA chart analysis.
X-ray generator
Z
X-Ray Detector X-ray detector Tilted Vertical CT
Scanning large circuit boards
Equipped with a 3 megapixel flat panel detector. Obstructed with vertical CT:
Rotary table
X-ray detector
When the sample is brought near the X-ray
Y X-ray generator generator to increase the magnification, it
Five-Axis Stage Rotated X will be obstructed by the X-ray generator
during CT imaging, making imaging at
In addition to the X, Y, and Z axes of the sample stage, maximum magnification impossible.
the detector tilts and rotates. XYZ stage Sample (Large substrate)
Five-axis movement supports inspections from any angle. Maximum trajectory for the sample
Vertical CT Viewed from above the Rotary Table

X-Ray Shield Box

The X-rays are well shielded. (Maximum 1 Sv/h external X-ray leakage) Observation Examples
The front door lock mechanism prevents the front door from opening during X-ray emission.
The interlock mechanism also disables movement of the 5-axis stage when the door is open.
For samples like circuit boards with planer CT, images with a high magnification can be obtained, unlike with orthogonal CT,
which is affected by the width of the sample.

Collision Sensor

A collision sensor is provided around the X-ray detector to stop the Stage in the event of an emergency (a collision with the
sample).

Utilities

System operation requires only the following: 200 V AC ± 10 %, 1.5 kVA (ground resistance 100 max.)
There is no need to provide air or cooling water.

Vertical CT Xslicer SMX-6010

Xslicer SMX-6010
12 Microfocus X-Ray Inspection System 13