Page 7 - Shimadzu EPMA-1720 Series

（幅215mm）
（幅213mm）
（幅195mm）
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Optimum X-Ray Spectrometer Design Offers

Highly Sensitive and Accurate Analysis

Maintains the 52.5° X-ray take-off angle that is fundamental to analytical performance.
X-ray take-off angle
High: Good spatial resolution
Electron beam
Low: Poor spatial resolution

High sensitivity caused by
Sample
low X-ray absorption

52.5°
A high X-ray take-off angle Analysis data for foreign matter in a pit.
also reduces the absorption Bottom-left is the distribution of iron (Fe);
effect when the bottom of bottom-right is the distribution of titanium (Ti).
a deep hole or the foreign The high take-off angle used by the EPMA-1720
matter in a hole is analyzed ensures highly accurate analysis of rough samples.
for examples.

Johanson-type analyzing crystal achieves perfect convergence.
Johanson-type analyzing Johan-type analyzing
crystal element crystal element
Shimadzu applied its unique crystal manufacturing
expertise fostered through the company’s long
R R
traditions to offer analyzing crystals that deliver
both high sensitivity and high resolution. The
Johanson-type analyzing crystal achieves perfect
2R 2R
convergence with no aberration.

Perfect convergence Imperfect convergence
High sensitivity and high resolution Low sensitivity and low resolution

EPMA-1720 accommodates up to ve 4-inch spectrometers that offer both high
sensitivity and high resolution.
The Rowland circle radius in the X-ray spectrometer is an important
Analyzing crystal
factor affecting the EPMA analytical performance. Increasing the
radius of the Rowland circle by one inch reduces the detection
sensitivity by more than 30%. Shimadzu EPMA instruments
accommodate up to five 4-inch spectrometers to cover the entire
Sample face Detection spectral range.
slit

EPMA-1720 Series
Electron Probe Microanalyzer 7

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