Page 31 - Shimadzu EPMA-1720 Series

Installation Requirements

Installation Requirements for EPMA-1720 Series
(Refer to the separate Pre-Installation Requirements for details.)

Ambient Conditions • Temperature 18 °C to 28 °C (Provide an air conditioning system to control temperature uctuation within ±1 °C.)
• Humidity 30%RH to 60%RH
• Heat Generation Rate When used with natural cooling water discharged: Approx. 2.1 kW
When used with cooling water circulation unit: Approx. 2.9 kW (including heat generated by that unit)
Installation Room • Floor Area W 4.5 m min. × D 3 m min. × H 2.5m min.
• Door Width: 1.25 m min., height: 1.8 m min.
Power Requirements • Analyzer Single phase 200 V AC ±10%, 30 A, 50/60 Hz, 1 circuit
• PC Single phase 100 to 240 V AC ±10%, 5 A, 50/60 Hz, 1 circuit
Grounding Resistance • 100 max.
Cooling Water • Water Supply Water pressure: 0.08 MPa to 0.18 MPa Flow rate: 0.7 L/min min.
Water temperature: 20 °C to 25 °C Faucet outer diameter: 11 mm
• Water Drainage Natural drainage (same height as oor)
Gas • PR Gas Mixture of Ar (Argon) + CH 4 (Methane) 10 vol %
Pressure: 1 kPa to 3 kPa
Flow rate: 10 mL/min to 14 mL/min
Connection port: Connect a gas cylinder lled to the following speci cations.
Gas lling pressure: 15 MPa max.
Cylinder port: W22 - 14 right-handed male screw
• Compressed Air Pressure: 0.45 MPa to 0.6 MPa
Connection port: Rc 1/4
• Dry Nitrogen Gas (EPMA-1720HT only. Recommended for purging electron gun when using CeB 6 .)
Pressure: 0.08 MPa to 0.1 MPa
Connection port: Joint for tube with 6 mm diameter
Vibration and
Stray Magnetic Fields Indicated in the Pre-Installation Requirements. For more information, contact your Shimadzu representative.
Laws and Regulations To prevent X-ray radiation accidents, safety regulations and standards for devices equipped with X-ray generators have been
established in each country. Observe the laws and regulations for X-ray generators that are applicable in the country where the
product is used. For noti cations on installation and safety controls, follow the necessary procedures in compliance with the
laws and regulations applicable in the country where the product is used.
(1) Rated output: 30 kV, 0.2 mA max. (2) Dose rate: 1 µSv/h or less

Layout Example

Note) Parts shown in broken lines are not
included in the standard con guration.

EPMA-1720 Series
Electron Probe Microanalyzer 31