Page 30 - Shimadzu EPMA-1720 Series

Speci cations

EPMA-1720T EPMA-1720HT

Electron Optical System
Electron Source W (tungsten) lament CeB 6 cathode (W lament is also available.)
Secondary-Electron Image Resolution 6 nm 5 nm
Accelerating Voltage 0.1 kV to 30 kV (in 0.1 kV increments: up to 5 kV setting is possible in 10 V units)
Beam Current 1 pA to 1 A
Magni cation 40× to 400,000×
Back-Scattered Electron Detector 4-block, semiconductor detector
Objective Aperture Fixed type (No selection required)
Observation Optical System
Resolution 1 m (for observation with the naked eye)
Field of View Approx. 600 m dia. (for observation with the naked eye), approx. 480 m × 360 m (on a computer screen)
Subject Depth 4 m
Sample Stage System
Maximum Sample Dimension 100 mm × 100 mm × 50 mm t
Maximum Sample Weight 2 kg
Maximum Stage Drive Range X, Y: 90 mm Z: 7 mm
Minimum Feed Distance X, Y: 0.02 m Z: 0.1 m
Maximum Stage Drive Speed X, Y: 15 mm/sec Z: 1 mm/sec
X-Ray Spectrometer System
Analyte Elements Range 4 Be to 92 U
Number of X-Ray Spectrometers 2 to 5 channels
X-Ray Take-Off Angle 52.5°
Rowland Circle Radius 4 inch (101.6 mm)
Evacuation System
Vacuum Level Analysis Chamber 1.0 × 10 or less
−3
Electron-Gun Assembly — 2.0 × 10 Pa or less
−5
Evacuation Pump Main Evacuation 1 turbomoleculer pump and 1 oil rotary pump
Preliminary Evacuation 1 oil rotary pump
Electron-Gun Evacuation — 1 ion pump
Vacuum Detection Penning gauge, Pirani gauge
Automated Functions Automatic evacuation (main chamber evacuation, shut-down, sample loading chamber evacuation,
electron gun chamber evacuation), automatic baking (EPMA-1720HT only)
Computer System
®
PC Windows 10 Pro (64 bit), main memory 8 GB or greater, HDD 1 TB or greater
Display 23-inch LCD (1920 × 1080)
Analysis Software
Analysis Mode Qualitative analysis, mapping analysis, quantitative analysis, calibration curve analysis, state analysis, line analysis
Automated Analysis Auto sequence analysis, easy mode analysis
Operation Support Data browser, report function, instrument monitor
Management Functions Environment set-up program
Observation Software
Control Functions Electron optical system control, observation system control, sample stage control,
X-ray spectrometer control, evacuation system control
Automated functions Auto focus, auto stigma, auto contrast/brightness,
lament automatic saturation, automatic beam current settings

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