Page 6 - Shimadzu SPM-Nanoa

02 Extensive Functionality

Capture Sharp Images with All Modes from Optical to SPM Microscopy

Targets can be searched by an optical microscope, and magnified observation is facilitated by SPM.
Other physical property information can be obtained with the same field-of-view as the surface shape image.

Sample: SiO2 patterns on Si

⾢Optical microscope image

⾢SPM large-area image

7.0 µm
7.0 µm

Small Current

Large Current

1.5 µm 1.5 µm

1.5 µm 1.5 µm

˛SPM high-resolution image ˛SPM electric current image
(Overlay display of surface shape
image and electric current image)
Wide Variety of Observation Modes

Supports a wide variety of observation modes, from observing shapes to mapping physical properties based on force
curve measurements.
That means physical properties can be evaluated with high resolution.

Shape Mechanical Properties Electromagnetivity Machining

Contact Mode Phase Mode Electric Current Mode* Vector Scanning*
Magnetic Force Mode (MFM)*
Dynamic Mode Lateral Force Mode (LFM)
Surface Potential Mode (KPFM)*
Force Modulation Mode Atmospheric Control
Piezoelectric Force Mode (PFM)*
Nano 3D Mapping Fast* STM* Observation in Liquid*
* Optional

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