Page 18 - Shimadzu SPM-Nanoa

Wide Assortment of Expansion Functionality

Microscope Unit

Optical Microscope

Cantilever

X-Y stage

Vibration Damping Mechanism
Scanner

Scanner Max. scanning size (X,Y,Z) Optical Microscope Total magnification rate
10 µm x 10 µm x 1 µm (standard) Observation About 220 to 1300 times
30 µm x 30 µm x 5 µm (optional) (when maximum displayed on
125 µm x 125 µm x 7 µm (optional) 21.5-inch monitor)
55 µm x 55 µm x 13 µm (optional)
2.5 µm x 2.5 µm x 0.3 µm (optional)
Sample Stage Max. sample size
ø50 mm x 8 mm
For 50 mm diameter samples, only the central area
can be observed
Max. stroke
±5 mm
When a 40 mm diameter or smaller sample
is placed in the center of the scanner

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