Page 9 - Shimadzu EDX-LE

Fully Equipped with Essential Functions

All-in-One Design Includes All Functions Required for RoHS/ELV Screening

Overall RoHS/ELV analysis performance is tied to the smooth coordination of a variety of analytical Qualitative-Quantitative Analysis *Additional function kit is required.
systems, creating a synergistic effect. The EDX-LE can perform qualitative analysis and
For this reason, EDX-LE standard equipment includes all the functions required for RoHS/ELV analysis, non-standard quantitative analysis based on the FP method. -FeKa
providing users with the optimal RoHS/ELV screening System. This means it can be used to analyze foreign substances or
differentiate between different materials. X-ray Fluorescence Intensity -CrKa

Stainless Steel (FP Method)
-V Ka -CrKb MnKa -FeKb -NiKa -CuKa -NiKb -CuKb -Moka -Mokb -RhKa -RhKb Quantitative Analysis Results for
5 10 15 20 25
Obtaining highly reliable analytical results Organize measurement results in a list [keV]
Qualitative Profile of Stainless Steel
Calibration Curve Method and FP Method List Creation Function
To improve the reliability of analysis results for elements List data stored in Excel format.
specified by the RoHS/ELV directive, the elements are
Matching (Steel T
ype Identification, Product Identification)
analyzed using the calibration curve method and standard Matching (Steel Type Identification, Product Identification) *Additional function kit is required.
sample (check sample) provided with the instrument. (The Comparing measurement data to a data library of steel types
Fundamental Parameter (FP) method is used to analyze allows automatic identification for everything from materials
some RoHS elements in metal samples.) Any other elements closest to the sample, to the 10th position on the library list.
detected are analyzed using the FP method, which uses In addition to matching by intensity, matching by content is
theoretical calculations to provide additional information. also available if the user creates and registers libraries of
concentrations and elements.
Compensates for the influence of
differences in shape of actual samples Note that this requires installation of Microsoft Office Excel before use. Intensity Matching Results Element and ContentElement and Content
Intensity Matching Results
on analysis results Registration Window
Shape Correction Function Accommodates a Variety of Samples
X-ray intensity differs with the shape and thickness of Sample Observation Function Thin-Film Analysis *Additional function kit is required.
samples, even if they contain the same material, and will When measuring foreign substances and samples with The Film FP method obtains not only single layer, but multilayer film thickness, composition, and deposit volume.
have an impact on quantitative values. EDX-LE utilizes a BG multiple parts, the sample observation camera allows the It is also well-suited to the measurement of Pb contained in plating. (Information on the layer order (including base) and the
internal standard method to eliminate the effect of shape and analysis position to be easily specified by checking the camera constituent elements is necessary.)
*
thickness in order to provide highly precise results.
image. If the sample is small or if specific locations on the
160 sample are being measured, the collimator can be used to Result of Qualitative Analysis
140 change the X-ray exposure region. P Ni Pb
120
100 −P Ka −Nika −AuLb1
80 Quantitative
Value with 50 nm
60
Correction
40
Quantitative
20 Value with X-ray Fluorescence Intensity X-ray Fluorescence Intensity X-ray Fluorescence Intensity 40 nm
0 No Correction
Mold Multiple Pellet 1 Film Film Film Film Variant
Standard Value pellets center 1 layer 2 layers 3 layers 4 layers
Comparison of Quantitative Results X-ray Fluorescence Intensity 30 nm
with BG Internal Standard Correction/No Correction −PbLb1
* BG internal standards method:
Fluorescent X-ray intensity of each element is standardized using scattered X-ray intensity. 20 nm
1 2 3 [keV] 7 8 [keV] 12 13 [keV]
10 mm dia. image (plastic) 3 mm dia. image (metal)
* Trace amounts of lead as a stabilizer detected
Large Sample Chamber Result of Quantitative Analysis 10 nm
Layer Info Analyte Result (Std. Dev.) Proc.-Calc. Line
Despite its compact
Total
body, the EDX can Elem. Quan
Quan
Elem.
accommodate samples Elem. Quan 11.00 11.50 12.00 [keV]
up to W370 mm × Elem. Fix Au evaporated film
D320 mm × H155 mm.
Example of Measurement of Electroless Ni-P Plating Example of Thickness Measurement for Thin-Film Sample
EDX-LE
8 Energy Dispersive X-ray Fluorescence Spectrometer 9