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Principle and Features of X-ray Fluorescence Spectrometry

Principle of Fluorescent X-ray Generation
When a sample is irradiated with X-rays from an X-ray tube, the
atoms in the sample generate unique X-rays that are emitted from X-ray
̠Ћ
the sample. Such X-rays are known as "fluorescent X-rays" and
they have a unique wavelength and energy that is characteristic of
each element that generates them. Consequently, qualitative K
analysis can be performed by investigating the wavelengths of the
X-rays. As the fluorescent X-ray intensity is a function of the L
concentration, quantitative analysis is also possible by measuring K shell
̠Ќ
X-ray
the amount of X-rays at the wavelength specific to each element. ʢЕ=Е 0ʣ
L shell M
LЋ
M shell
Atomic nucleus Electron Hole
Electron Paths and Principle of X-ray Generation Expressed as a Bohr Model

Supports Various Applications in Many Fields

Electrical/electronic materials Ceramics
ɾRoHS and halogen screening ɾAnalysis of ceramics, cement, glass, bricks, and clay
ɾThin-film analysis for semiconductors, discs, liquid crystals, and
solar cells Oil and petrochemicals
ɾAnalysis of sulfur in oil
Automobiles and machinery
ɾAnalysis of additive elements and mixed elements in lubricating oil
ɾELV hazardous element screening
ɾComposition analysis, plating thickness measurement, and chemical Chemicals
conversion coating film weight measurement for machine parts ɾAnalysis of products and organic/inorganic raw materials
ɾAnalysis of catalysts, pigments, paints, rubber, and plastics
Ferrous/non-ferrous metals
ɾMain component analysis and impurity analysis of raw materials, Environment
alloys, solder, and precious metals
ɾAnalysis of soil, effluent, combustion ash, filters, and fine
ɾComposition analysis of slag
particulate matter
Mining Pharmaceuticals
ɾGrade analysis for mineral processing
ɾAnalysis of residual catalyst during synthesis
ɾAnalysis of impurities and foreign matter in active pharmaceutical
ingredients
Agriculture and foods

ɾAnalysis of soil, fertilizer, and plants
ɾAnalysis of raw ingredients, control of added elements, and
analysis of foreign matter in foods
Other

ɾComposition analysis of archeological samples and precious stones,
analysis of toxic heavy metals in toys and everyday goods

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