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Comprehensive Quantitation Functions
Calibration Curve Method
A standard sample is measured and the relationship with the fluorescent X-ray intensity
plotted as a calibration curve, which is used for the quantitation of unknown samples.
Although this method requires selection of a standard sample close to the unknown sample
and creation of a calibration curve for each element, it achieves a high level of analysis
accuracy.
This method supports all types of corrections for coexistent elements,
including absorption/excitation correction and correction for
overlapping elements.
Fundamental Parameter (FP) Method
This method uses theoretical intensity calculations to determine the Automatic Balance Setting Function (Patent pending)
composition from the measured intensities. It's a powerful tool for A balance setting is required to use the FP method on principal
the quantitative analysis of unknown samples in cases where components such as C, H, and O. The software automatically sets the
preparation of a standard sample is difficult. (JP No. 03921872, DE balance if it determines from the profile shape that a balance setting
No. 60042990. 3-08, GB No. 1054254, US No. 6314158) is required.
Film FP Method
The instrument also offers the thin-film FP method function. The film
FP method permits the film thickness measurement of multilayer films,
simultaneous film thickness measurements, and quantitative film
composition.
When using the film FP method, the substrate material, deposition
sequence, and element information can be set.
Background FP Method
Fluorescent X-ray Compton-scattered
intensity of quantitative radiation from Rh X-ray
The background FP method adds scattered X-ray (background) element tube target material
calculations to the conventional FP method, which only calculates the Rayleigh-scattered
fluorescent X-ray peak intensity (net peak intensity). Quantitative element radiation from Rh
X-ray tube target material
background
(Patent pending : Japanese Patent No. 5975181) X-ray intensity
This method is effective at improving quantitation accuracy for small
Continuous X-rays
quantities of organic samples, film thickness measurements of
irregular-shaped plated samples, and film thickness measurements of
organic films. Energy
Matching Function
The matching function compares analysis data for a sample with an
existing data library and displays the results in descending degree of
confidence.
The library contains content data and intensity data and the user can
register each type. The content data values can be entered manually.
Matching Results
EDX-7200
10 Energy Dispersive X-Ray Fluorescence Spectrometer