Page 15 - Shimadzu IRXross

Semiconductor Environmental
Applications Applications
(Monitoring Semiconductor-Related (Exhaust Gas Analysis)
Gases)

Gas analysis requires selecting a cell length and window material appropriate for the type and concentration of gas
being analyzed. Longer optical path lengths result in greater than normal light losses, but reliable data can be
obtained using a high-sensitivity interferometer to suppress baseline noise. Additionally, an MCT kit can be
installed to increase sensitivity.

Time Course Software

The time course program is used to collect spectra in regular
intervals. It creates a time course dataset used to follow
reactions as a function of time. Changes in peak height and
peak area can be used to calculate values related to reaction
kinetics. Time course information is saved and displayed in
3D (bird’s eye view) or in a contour plot. The scan interval is
dependent on resolution, number of scans, and mirror
speed. The fastest speed under a 16 cm resolution and a
−1
mirror speed of 9 mm/s is 7 seconds for 1 accumulated scan.

Gas Cell

Gas cells are used for analysis of gas samples, and the path
length is selected based on the concentration of the
samples. Gas cells with short path lengths of 5 or 10 cm and
long path lengths of 10 m or more are available.

5-cm Gas Cell Long-Path
Gas Cell

MCT Kit

Use a high-sensitivity MCT detector for analyses where a large amount of light is not available, such as monomolec-
ular film analysis on metal substrates, high-speed reaction tracking, and low-concentration gas analysis using a gas
cell with a long path length. The kit installs an MCT detector on the IRXross. Switching between the standard
DLATGS detector and the MCT detector is performed automatically from LabSolutions IR. In addition, the kit has a
built-in liquid nitrogen sensor to terminate current flow when the detector element is not being cooled, thus
protecting the MCT detector.

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